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Tantalum sputtering Bartilmaameedka - Disc

Sharaxaad Gaaban:

Bartilmaameedka Tantalum sputtering waxaa inta badan lagu dabaqaa warshadaha semiconductor iyo warshadaha daahan indhaha.Waxaan soo saareynaa tilmaamo kala duwan oo bartilmaameedyada tantalum-ka ah marka ay codsadaan macaamiisha warshadaha semiconductor iyo warshadaha indhaha iyada oo loo marayo habka dhalada foornada vacuum EB.Anagoo ka digtoonaanayna habka duubista gaarka ah, iyada oo loo marayo daawaynta qalafsan iyo heerkulka nuugista saxda ah iyo waqtiga, waxaanu soo saarnaa cabbiro kala duwan oo ah bartilmaameedyada tantalum-ka sida bartilmaameedyada saxanka, bartilmaameedyada leydiga ah iyo bartilmaameedyada wareega.Intaa waxaa dheer, waxaan dammaanad qaadaynaa nadiifinta tantalum waxay u dhaxaysaa 99.95% ilaa 99.99% ama ka sareeya;cabbirka hadhuudhku waxa uu ka hooseeyaa 100um, fidsanaantuna waxa ay ka hoosaysaa 0.2mm iyo Dusha sare


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Sharaxaada

Bartilmaameedka Tantalum sputtering waxaa inta badan lagu dabaqaa warshadaha semiconductor iyo warshadaha daahan indhaha.Waxaan soo saareynaa tilmaamo kala duwan oo bartilmaameedyada tantalum-ka ah marka ay codsadaan macaamiisha warshadaha semiconductor iyo warshadaha indhaha iyada oo loo marayo habka dhalada foornada vacuum EB.Anagoo ka digtoonaanayna habka duubista gaarka ah, iyada oo loo marayo daawaynta qalafsan iyo heerkulka nuugista saxda ah iyo waqtiga, waxaanu soo saarnaa cabbiro kala duwan oo ah bartilmaameedyada tantalum-ka sida bartilmaameedyada saxanka, bartilmaameedyada leydiga ah iyo bartilmaameedyada wareega.Intaa waxaa dheer, waxaan dammaanad qaadaynaa nadiifinta tantalum waxay u dhaxaysaa 99.95% ilaa 99.99% ama ka sareeya;cabbirka hadhuudhku waxa uu ka hooseeyaa 100um, fidsanaantuna waxa ay ka hoosaysaa 0.2mm iyo Roughness Dusha sare waxa uu ka hooseeyaa Ra.1.6μm.Baaxadda waxaa lagu saleyn karaa shuruudaha macaamiisha.Waxaan ku xakameynaa tayada alaabtayada iyada oo loo marayo ilaha alaabta ceeriin ilaa dhammaan khadka wax soo saarka oo ugu dambeyntii u dhiibo macaamiisheena si aan u hubinno inaad ku iibsatid alaabtayada tayo leh oo isku mid ah mid kasta.

Waxaan isku dayeynaa intii karaankeena ah inaan casriyeyno farsamadeena, kor u qaadno tayada badeecada, kordhino heerka isticmaalka badeecada, hoos u dhigida kharashyada, hagaajinta adeegeena si aan u siino macaamiisheena alaab tayo sare leh laakiin qiimo jaban iibsi.Marka aad na doorato, waxaad heli doontaa badeecadeena tayo sare leh oo xasiloon, qiimo ka tartan badan alaab-qeybiyeyaasha kale iyo adeegyadayada waxtarka leh ee waqtiga ku habboon.

Waxaan soo saareynaa bartilmaameedyada R05200, R05400 kuwaas oo buuxinaya heerka ASTM B708 ​​waxaanan sameyn karnaa bartilmaameed sida ku cad sawirada aad bixisay.Anaga oo ka faa'iidaysanayna tayada sare ee tantalum ingots, qalab horumarsan, tignoolajiyada cusub, kooxda xirfadlayaasha ah, waxaanu ku habbaynay yoolalkaaga xashiishka ee loo baahan yahay.Waxaad noo sheegi kartaa dhammaan shuruudahaaga waxaanan u hurnay wax soo saarka baahidaada.

Nooca iyo Cabbirka:

ASTM B708 ​​Heerka Tantalum Sputtering Bartilmaameedka , 99.95% 3N5 - 99.99% 4N daahirnimo, Bartilmaameedka Disc

Waxyaabaha Kiimikada ah:

Falanqaynta Caadiga ah:Ta 99.95% 3N5 - 99.99%(4N)

wasakhda birta ah, ppm ugu badnaan miisaan ahaan

Curiyaha Al Au Ag Bi B Ca Cl Cd Co Cr Cu Fe
Nuxurka 0.2 1.0 1.0 1.0 0.1 0.1 1.0 1.0 0.05 0.25 0.75 0.4
Curiyaha Ga Ge Hf K Li Mg Na Mo Mn Nb Ni P
Nuxurka 1.0 1.0 1.0 0.05 0.1 0.1 0.1 5.0 0.1 75 0.25 1.0
Curiyaha Pb S Si Sn Th Ti V W Zn Zr Y U
Nuxurka 1.0 0.2 0.2 0.1 0.0 1.0 0.2 70.0 1.0 0.2 1.0 0.005

wasakhda aan biraha ahayn, ppm max marka loo eego miisaanka

Curiyaha N H O C
Nuxurka 100 15 150 100

Balance: Tantalum

Cabbirka Hadhuudhka: Cabbirka caadiga ah<100μm Cabbirka Hadhuudhka

Cabbirka hadhuudhka kale ayaa la heli karaa marka la codsado

Baaxadda: ≤0.2mm

Dusha sare: < Ra 1.6μm

Dusha sare: waa la toleeyey

Codsiyada

Qalabka dahaarka ee semiconductors, optics


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